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SpinDistribute.com Article Directory

The following article was published in our article directory on August 1, 2019.
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Plasme Cleaning and Treatment

Article Category: Advice

Author Name: Gordon Whitlock

Plasma cleaning is the removal of impurities and contaminants from surfaces through the use of an energetic plasma created from gaseous species. Gases such as room air, argon and oxygen as well as mixtures such as air and hydrogen/nitrogen are used. The plasma is created by using Radio Frequency of (typically 100 kHz or 13.56 MHz) to ionize the process gas at a pressure of around 500 mT. Glow Research offers plasma systems using both 100 kHz and 13.56 MHz. 100 kHz systems typically cost less because they do not require an expensive tuning network.

Plasma treatment and surface wettability is also the goal of many plasma cleaning/treatment operations. Precise control and characterization of surface wettability is critical when applying coatings, inks, adhesives, and other materials to solid surfaces. This is particularly true of plastics which generally exhibit poor wettability due to low surface free energy (SFE). Plasma treatment can improve wettability, but thorough characterization of the treated surface is needed to demonstrate efficacy as well as optimize the process to reduce costs. Typically a short duration time for plasma treatment is best—a longer plasma treatment can cause the growth of a native oxide which may result in the sample being less hydrophilic.

Contact angle (CA) measurements incorporated into SFE calculations can both optimize the process and provide physical insight into complex surface reactions.

In plasma, gas atoms are excited to higher energy states and also ionized. As the atoms and molecules relax to their normal, lower energy states they release a photon of light. This results in the characteristic "glow" or light associated with plasma. Different gases give different colors. For example, oxygen plasma emits a dull pink or dim blue color.

A plasma's activated species include atoms, molecules, ions, electrons, free radicals and photons. This mixture then interacts with any surface placed in the plasma. A gas plasma operating from .5 to 1 Torr can reach into cavities and tubes and change the surface wettability.

Whether or not organic removal is complete can be assessed with contact angle measurements. When an organic contaminant is present, the contact angle of water with the device will be high. After the removal of the contaminant, the contact angle will be reduced to that characteristic of contact with the pure substrate.
After treatment, the contact angle of a water droplet is decreased becoming less than its value on the untreated surface.

Plasma ashing is the process in which plasma cleaning is performed for the sole purpose of removing carbon. Plasma ashing is always done with O2 gas.
The wettability of polypropylene (PP), a naturally hydrophobic material, is significantly improved using plasma treatment with the Glow Plasma System. Other polymers such as PVC and PDMS can also be processed with good results in the GLOW Plasma System.

Keywords: plasma cleaner, plasma cleaners, plasma etchers

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